| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fixing and supporting a probe card and its probe substrate which can satisfactorily maintain plane parallelism of tip parts of a probe group. SOLUTION: A probe card which comprises a circuit board wherein the first connecting terminals are arranged at its undersurface, a probe substrate wherein the second connecting terminals respectively corresponding to the first connecting terminals are arranged at its top surface and wherein a plurality of probes are arranged at its undersurface, a group of relaying connection pins which is attached to the first connecting terminal and is electrically connected to the second connecting terminal in contact with the second connecting terminal, a supporing body which supports the perimeter section of the probe substrate, and a supporting bolt which connects the supporting body and the circuit board or the circuit board and a stiffening plate, wherein the supporting body comprises a undersurface supporting body and a top surface supoprting body, and wherein the perimeter section of the probe substrate is pinched in its vertical direction by both of the supporting bodies so that the probe substrate is fixed and supported. COPYRIGHT: (C)2009,JPO&INPIT
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