发明名称 Device with MOSFET on SOI
摘要 The device (1) has an upper region (102) including a MOSFET type semiconductor device i.e. P-channel MOS transistor (106), with a metallic gate (108) and arranged on a semiconductor layer (118). A lower region (104) has a MOSFET type semiconductor device i.e. N-channel MOS transistor (134), arranged on a portion (132b) of another semiconductor layer, where the layers are made of strained silicon. The transistor (134) has a gate (128b) formed by a portion of a metallic layer. The latter semiconductor layer is arranged on an insulating layer (146) stacked on another metallic layer (148). An independent claim is also included for a method of manufacturing a silicon-on-insulator MOSFET device.
申请公布号 EP1947686(A3) 申请公布日期 2010.02.24
申请号 EP20080100640 申请日期 2008.01.18
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 CORONEL, PHILIPPE;FENOUILLET-BERANGER, CLAIRE
分类号 H01L21/336;H01L21/84;H01L27/12 主分类号 H01L21/336
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