| 摘要 |
PURPOSE: A laser processing method using an assistance gas is provided to secure the intensity of a target by manufacturing the target repeatedly with a laser beam and removing the melt generated in real time. CONSTITUTION: A target is mounted in a stage and is loaded into a processing chamber. A control parameter including a polygon mirror rotation speed, a feeding speed of stage, a laser beam discharge condition, an assist gas spray condition is set(S101). The polygon mirror is rotated based on the control parameter(S103). The stage is moved to a predetermined direction(S105). A halogen compound assist gas is sprayed according to control parameter(S107). The laser beam is emitted and is projected on the polygon mirror according to the control parameter(S109). The laser beam reflected from the polygon mirror is projected on the target(S111).
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