摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production method of silicon for improving the reaction rate in a reduction reaction of a halogenated silane. <P>SOLUTION: The production method of silicon comprises reacting a halogenated silane expressed by formula (1): SiH<SB>n</SB>X<SB>4-n</SB>with a reducing agent to produce silicon and includes a step of reacting a halogenated silane with a reducing agent at the melting temperature of silicon or higher to produce silicon in a liquid state. In the formula, n represents an integer from 0 to 3 and X represents an atom selected from a group consisting of F, Cl, Br and I. When n is 0 to 2, X may be identical or different from each other. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |