| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing liquid cleaning device which easily cleans a processing liquid, and which a circulation mechanism for separation is easily attached to. Ž<P>SOLUTION: The processing liquid cleaning device is provided with a circulation mechanism 4 for separation that supplies a processing liquid stored in a processing liquid tank 1 to a separation mechanism 3, and returns the processing liquid discharged from the separation mechanism 3 to the processing liquid tank 1. The processing liquid returned from the circulation mechanism 4 for separation forms a vortex in the center of the processing liquid tank 1; a temperature adjustment mechanism 2 is installed in the central region of the processing liquid tank 1 with clearance above the bottom 1c of the processing liquid tank 1; and a first suction part 6a is provided, wherein the circulation mechanism 4 for separation is inserted into the processing liquid tank 1 from the opening 1a of the processing liquid tank 1, and the first suction part 6a sucks the processing liquid under the temperature adjustment mechanism 2 and supplies to the separation mechanism 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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