| 发明名称 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
| 摘要 |
<p>A fluid handling structure is disclosed in which measures are taken to increase the speed at which meniscus breakdown occurs. Measures include the shape of a plurality of fluid extraction openings (50) and the shape and density of a plurality of fluid supply openings in the fluid handling structure.</p> |
| 申请公布号 |
EP2131241(A2) |
申请公布日期 |
2009.12.09 |
| 申请号 |
EP20090157105 |
申请日期 |
2009.04.01 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DIRECKS, DANIEL;PHILIPS, DANNY;DUNGEN VAN DEN, CLEMENS;STEFFENS, KOEN;PUTTEN VAN, ARNOLD |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
