METHOD AND APPARATUS FOR STABILIZING A GLOW DISCHARGE PLASMA UNDER ATMOSPHERIC CONDITIONS
摘要
Method and apparatus for generating and sustaining a glow discharge plasma in a plasma discharge space comprising at least two spaced electrodes. The method and apparatus are arranged for performing the steps of introducing in the discharge space a gas or gas mixture under atmospheric pressure conditions, energizing the electrodes by applying an AC energizing voltage (Va) to the electrodes, and controlling the energizing voltage (Va) such that at plasma generation a sharp relative decrease of displacement current is provided. <IMAGE>
申请公布号
EP1697961(B1)
申请公布日期
2009.12.09
申请号
EP20040808812
申请日期
2004.12.22
申请人
FUJIFILM MANUFACTURING EUROPE B.V.
发明人
ALDEA, EUGEN;BOUWSTRA, JAN, BASTIAAN;VAN DE SANDEN, MAURITIUS, CORNELIUS, MARIA;DE VRIES, HINDRIK, WILLEM