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发明名称
LIQUID PHASE EPITAXIAL GROWTH PROCESS
摘要
申请公布号
JPS6131385(A)
申请公布日期
1986.02.13
申请号
JP19840151279
申请日期
1984.07.23
申请人
SHOWA DENKO KK
发明人
DOI SUSUMU
分类号
C30B19/00;C30B29/40;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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