Single thin plate storage container

摘要

A single thin plate storage container is provided so that a housed semiconductor wafer is capable of easy insertion and removal. The single thin plate storage container includes a container body which houses a single semiconductor wafer therein and a lid unit attached to the container body. The container body includes a bottom plate on which the semiconductor wafer is placed and a peripheral wall portion formed around the bottom plate, and the bottom plate is formed by protruding up to a position higher than the peripheral wall portion. The bottom plate of the container body is provided with a plurality of thin plate supporting convex strips for supporting the semiconductor wafer in a state where a space is provided between the semiconductor wafer and the bottom plate. The inner side surface of the top plate of the lid unit is provided with a plurality of retainers which support a peripheral portion of the semiconductor wafer placed on the bottom plate of the container body.