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发明名称
摘要
申请公布号
JP4372021(B2)
申请公布日期
2009.11.25
申请号
JP20050020942
申请日期
2005.01.28
申请人
发明人
分类号
H01L21/316;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/316
代理机构
代理人
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