| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can accelerate a machining speed. <P>SOLUTION: The axicon lens 13 deepens the depth of the focus of laser beam condensed from a laser beam source12 by providing conical slant face parts with at least two or more slant faces having different angles. The laser beam in which the depth of the focus has been deepened by the axicon lens 13 is converted into parallel beam by an aspheric lens 14, and a workpiece W is irradiated with the converted parallel beam by an fθlens 17. In this way, the depth of the focus of the laser beam condensed by the fθlens 17 is deepened. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
