| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist coating method which reduces an internal capacity of a resist filter part, and can clean a resist line easily, certainly and moreover safely. SOLUTION: In the resist coating method for a resist coater having a line, the method has the steps of: attaching a jig having a cavity having a built-in filter to the line to supply a resist; attaching a jig which is attached to the line in place of the jig, has a smaller internal capacity than the cavity having the built-in filter, and does not contain the filter for cleaning; sending an N<SB>2</SB>gas to the line under pressure; and attaching a jig to the line which has the cavity having the built-in filter in place of the jig which has the cavity not containing the filter to supply a resist. COPYRIGHT: (C)2009,JPO&INPIT
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