| 摘要 |
A method for manufacturing a fluid ejecting head that includes a nozzle formation process in which a nozzle is formed in a nozzle substrate. The nozzle has a first concave portion and a smaller, corresponding second concave portion. The fluid ejecting head is assembled by combining the nozzle substrate, a cavity substrate, and an electrode substrate. As part of the method of manufacturing, an oxide-film etching process is performed in such a manner that a sidewall portion of a concave formed in an oxide film on the surface of a nozzle substrate has an inclined portion that has an angle of inclination that is obtained through isotropic etching and further that the depth-directional distance of the inclined portion is set at a value that is larger than that of the depth-directional distance of the oxide film that is etched in a subsequent oxide-film etching process.
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