METHOD OF MANUFACTURING COLOR FILTER SUBSTRATE, AND COLOR FILTER SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To raise contrast between an alignment mark and a colored resist and to raise alignment accuracy.

SOLUTION: A method of manufacturing a color filter substrate includes a step of forming the alignment mark (40) having a level difference (40s) by performing etching treatment to an noneffective region (31a) except an effective region (11a) where a colored layer is formed at a substrate surface of a substrate (10m), a step of applying a colored resist (50b) on the substrate after the step of forming the alignment mark and a step of forming the colored layer (55b) by exposing and developing the applied colored resist after performing alignment of the substrate and a photomask (200b) by optically reading the alignment mark.

COPYRIGHT: (C)2009,JPO&INPIT