| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic drive actuator in which ratio of maximum capacity value to the minimum capacity value obtained by variations in a variable capacitance element can be further increased than a conventional one. SOLUTION: The electrostatic drive actuator has a fixed electrode installed on a substrate and movable electrodes installed on a thin-film structure jointed to the substrate. The movable electrodes are installed on each stage of the thin-film structure of a multi-stage construction. COPYRIGHT: (C)2009,JPO&INPIT
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