| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection jig capable of suppressing the occurrence of flaws on a terminal surface of an object to be inspected. SOLUTION: The inspection jig 1 includes: a plurality of flexible and elastic probes 5 each being made wire-shaped and having the head for contacting with the object to be inspected; a head side support 2 having a head side through-hole through which the head side part of the probe 5 is brought to pass, and an opposite surface 2a positioned so as to be opposite to the object to be inspected; a back-end side support 3 being disposed posterior to the head side support 2 at a prescribed spacing and having a bask-end side through-hole through which the back-end side part of the probe 5 is brought to pass; a coupler 4 for coupling the head side support 2 and the back-end side support 3; an electrode 7 being disposed posterior to the back-end side support 3 and having a contact surface 7a with which the back-end of the probe 5 contacts; and a forcing mechanism 8 for forcing the head side support 2, the back-end side support 3 and the coupler 4 in a direction in which the opposite surface 2a departs from the contact surface 7a. COPYRIGHT: (C)2009,JPO&INPIT
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