| 摘要 |
A process for preparing high purity trichlorosilane (TCS) utilizing contaminated by-products of primary reaction products hydrogen chloride, metallurgical or chemical grade silicon stock, and/or by-products of the improved Siemens process, including "dirty" TCS containing low boiling impurities such as dichlorosilane (DCS) and "dirty" STC containing high boiling impurities. The "dirty" STC is first purified and a portion is reacted with "dirty" TCS containing DCS to produce additional TCS feedstock for the TCS purification process. Another portion of the purified STC is hydrogenated and converted back to TCS providing another feedstock to the TCS purification process. Overall net yield of high purity TCS produced is increased over established practice.
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