,申请号JP20000013531-传众专利搜索

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发明名称
摘要
申请公布号	JP4232307(B2)	申请公布日期	2009.03.04
申请号	JP20000013531	申请日期	2000.01.21
申请人		发明人
分类号	H01L21/22;H01L21/31;F27B5/04;F27B5/10;F27B5/18;F27D7/00;F27D7/06;H01L21/00	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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