| 摘要 |
PROBLEM TO BE SOLVED: To provide a production scheduling method and a system for allocating a putting-in-lot to an aligner used in a first photolithography process so that a proper conditioning work of the aligner used in the photolithography process is specified and loads between the aligners are equalized to realize a lower TAT in a semiconductor device manufacturing line of a high-mix low-volume production. SOLUTION: The load of the current lot in hand and the lot to be put in is respectively calculated for each aligner used in the first photolithography process in the semiconductor manufacturing line. The aligner used in the first photolithography process is allocated so that variations in load among the aligners are minimum. The production scheduling is specified for the aligner which has no conditioning operation. COPYRIGHT: (C)2005,JPO&NCIPI |
