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发明名称
Technik zur Herstellung eingebetteter Metallleitungen mit einer erhöhten Widerstandsfähigkeit gegen durch Belastung hervorgerufenen Materialtransport
摘要
申请公布号
DE102004003863(B4)
申请公布日期
2009.01.29
申请号
DE20041003863
申请日期
2004.01.26
申请人
ADVANCED MICRO DEVICES INC.
发明人
MEYER, MORITZ-ANDREAS;ENGELMANN, HANS-JUERGEN;ZSCHECH, EHRENFRIED;HUEBLER, PETER
分类号
H01L21/768;H01L21/44;H01L21/4763;H01L23/52;H01L23/532;H01L29/40
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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