发明名称 POLISHING SHEET AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>Provided is a polishing sheet which requires only a short time before start-up. A method for manufacturing such polishing sheet is also provided. The polishing sheet is composed of a sheet-like foam. The polishing sheet is characterized in that the surface is finished by being buffed, as final finishing, with an abrasive whose grain diameter is 60-200 in yarn count (60-200 mesh).</p>
申请公布号 WO2008156002(A1) 申请公布日期 2008.12.24
申请号 WO2008JP60522 申请日期 2008.06.09
申请人 NEC ELECTRONICS CORPORATION;TORAY INDUSTRIES, INC.;YOSHIDA, SHIGEYUKI;HONDA, TOMOYUKI;SUGIMURA, MASAHIRO 发明人 YOSHIDA, SHIGEYUKI;HONDA, TOMOYUKI;SUGIMURA, MASAHIRO
分类号 B24B37/00;B24B29/02;B24B37/20;B24B37/24;H01L21/304 主分类号 B24B37/00
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