| 发明名称 |
PENTAKIS(DIMETHYLAMINO) DISILANE PRECURSOR COMPRISING COMPOUND AND METHOD FOR THE PREPARATION THEREOF |
| 摘要 |
<p>Pentakis(dimethylamino) disilane with general formula (1): Si2(NMe2)5Y, where Y is selected from the group comprising H, CI or an amino group its preparation method and its use to manufacture gate dielectric films or etch-stop dielectric films of SiN or SiON. ® KIPO & WIPO 2009</p> |
| 申请公布号 |
KR20080112356(A) |
申请公布日期 |
2008.12.24 |
| 申请号 |
KR20087026733 |
申请日期 |
2006.04.03 |
| 申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
DUSSARRAT CHRISTIAN |
| 分类号 |
C07F7/10;C07F7/12;C23C16/40 |
主分类号 |
C07F7/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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