ORGANOSILANE POLYMERS, HARDMASK COMPOSITIONS INCLUDING THE SAME AND METHODS OF PRODUCING SEMICONDUCTOR DEVICES USING ORGANOSILANE HARDMASK COMPOSITIONS

摘要

Provided herein, according to some embodiments of the invention, are organosilane polymers prepared by reacting organosilane compounds including (a) at least one compound of Formula I Si(OR₁)(OR₂)(OR₃)R₄ (I) wherein R₁, R₂ and R₃ may each independently be an alkyl group, and R₄ may be -(CH₂)_nR₅, wherein R₅ may be an aryl or a substituted aryl, and n may be 0 or a positive integer; and (b) at least one compound of Formula II Si(OR₆)(OR₇)(OR₈)R₉ (II) wherein R₆, R₇ and R₈ may each independently an alkyl group or an aryl group; and R₉ may be an alkyl group. Also provided are hardmask compositions including an organosilane compound according to an embodiment of the invention, or a hydrolysis product thereof. Methods of producing semiconductor devices using a hardmask compostion according to an embodiment of the invention, and semiconductor devices produced therefrom, are also provided.