SCAN TYPE LASER PROCESSING APPARATUS HAVING MEASURING UNIT

摘要

A scan type laser processing apparatus for accurately analyzing the processing result of the specimen processed by the laser beam is provided. A scan type laser processing apparatus using the laser beam comprises a light source(110) irradiating the laser beam; a scanner(120) changing the progressive direction and incident angle of the laser beam; a first optic(130) focusing the laser beam provided from scanner on specimen; an aperture(160) selecting the scattering signal corresponding to the corresponding incident laser beam from a plurality of scattering signals emitted in the majority area of the specimen(150); and a measuring unit(200) measuring the processed information of specimen with the scattering signal.