| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic visual examination device capable of shortening the processing cycle time required in the visual examination of a silicon wafer or a glass substrate. SOLUTION: The automatic visual examination device (1) for automatically visually examining a plurality of inspection places (T) in a target work (K) is equipped with a work holding means (2) for holding the target work (K), irradiation imaging means (5 and 7) for imaging the respective inspection places (T), while irradiating them with a flash (L); a relative moving means (3) for relatively moving the work holding means (2) and the irradiation imaging means (5 and 7) and a determining means (9) for swtwermining whether there is a flaw in the appearance of the inspection places (T) based on the images of the inspection places (T) obtained by the irradiation imaging means (5 and 7). The flash (L) emitted from the irradiation imaging means (5 and 7) is obtained from a xenon discharge pipe and a control means (8) for controlling the xenon discharge pipe so as to emit the flash (L) with predetermined timing. COPYRIGHT: (C)2008,JPO&INPIT
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