发明名称 |
DISK-SHAPED SUBSTRATE MANUFACTURING METHOD |
摘要 |
The disk-shaped substrate manufacturing method is provided with: generating an air stream downward from an upper area during grinding a disk-shaped substrate in a grinding apparatus; arranging the grinding apparatus on an upper floor face of a floor and arranging water on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance; and guiding dust made by the grinding apparatus to the water by use of the air stream.
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申请公布号 |
US2008233841(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
US20080054078 |
申请日期 |
2008.03.24 |
申请人 |
SHOWA DENKO-K.K.;CITIZEN SEIMITSU CO., LTD. |
发明人 |
HANEDA KAZUYUKI;FUJINAMI SATOSHI;JONOUCHI TAKESHI |
分类号 |
B24B55/06;B24B7/24 |
主分类号 |
B24B55/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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