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发明名称
Vorrichtung und Verfahren zur Wärmeverwaltung in einem Massenstrom-Steuergerät
摘要
申请公布号
DE10297602(B4)
申请公布日期
2008.09.25
申请号
DE20021097602
申请日期
2002.11.20
申请人
MKS INSTRUMENTS INC.
发明人
AMBROSINA, JESSE;SUZUKI, ISAO;SHAJII, ALI
分类号
G01F1/00;G01F5/00;G01F1/684;G01F15/04;G05D7/06
主分类号
G01F1/00
代理机构
代理人
主权项
地址
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