SILICON POLYMERS, METHODS OF POLYMERIZING SILICON COMPOUNDS, AND METHODS OF FORMING THIN FILMS FROM SUCH SILICON POLYMERS
摘要
Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae Si<SUB>n</SUB>H<SUB>2n</SUB> and Si<SUB>n</SUB>H<SUB>2n+2</SUB> as well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content.
申请公布号
WO2008045327(B1)
申请公布日期
2008.09.25
申请号
WO2007US21403
申请日期
2007.10.04
申请人
KOVIO, INC.;KARSHTEDT, DMITRY;ROCKENBERGER, JOERG;ZUERCHER, FABIO;RIDLEY, BRENT;SCHER, ERIK
发明人
KARSHTEDT, DMITRY;ROCKENBERGER, JOERG;ZUERCHER, FABIO;RIDLEY, BRENT;SCHER, ERIK