| 摘要 |
A multi-bulk stacker system for a test handler is provided to improve a manufacturing yield of a semiconductor device by successively supplying and recollecting plural prime lots to and from the test handler. A test handler(200) includes a loading unit(201), a soak chamber, a test chamber, a desoak chamber, and an unloading unit(202). Rotary frames(20,20') are rotated by a motor. Fixing frames are vertically formed on a center of the rotary frame. First sides of modules(10,10') are radially mounted on a periphery of the fixing frame. A lower portion of the module is mounted on the rotary frame. A receiving portion for holding plural lots is formed inside the module. A sensor is arranged under the lower-side rotary frame for the respective modules, such that the modules are recognized. One of two bulk stackers is arranged on a loading side of the test handler, while the other is arranged on an unloading side. |
