发明名称 |
METHOD FOR PRODUCING FINE PARTICLE, AND PRODUCTION DEVICE FOR FINE PARTICLE |
摘要 |
<P>PROBLEM TO BE SOLVED: To produce desired fine particles without requiring special time and effort for their recover. <P>SOLUTION: The production of fine particles is performed through: a stage where a cylindrical rotary stage 2 is rotated; a stage where an inert gas is introduced; and a stage where physical vapor growth is started, so as to produce fine particles 11. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008163380(A) |
申请公布日期 |
2008.07.17 |
申请号 |
JP20060352606 |
申请日期 |
2006.12.27 |
申请人 |
SONY CORP |
发明人 |
KATORI KENJI;SUDO HAJIME;MOTOMURA ISATO;KASHIWANUMA AKIO;MATSUKI HIROSHI |
分类号 |
B22F9/02;B01J23/42;B22F1/02;C23C14/08;H01M4/92 |
主分类号 |
B22F9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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