发明名称 METHOD FOR PRODUCING FINE PARTICLE, AND PRODUCTION DEVICE FOR FINE PARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To produce desired fine particles without requiring special time and effort for their recover. <P>SOLUTION: The production of fine particles is performed through: a stage where a cylindrical rotary stage 2 is rotated; a stage where an inert gas is introduced; and a stage where physical vapor growth is started, so as to produce fine particles 11. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008163380(A) 申请公布日期 2008.07.17
申请号 JP20060352606 申请日期 2006.12.27
申请人 SONY CORP 发明人 KATORI KENJI;SUDO HAJIME;MOTOMURA ISATO;KASHIWANUMA AKIO;MATSUKI HIROSHI
分类号 B22F9/02;B01J23/42;B22F1/02;C23C14/08;H01M4/92 主分类号 B22F9/02
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