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发明名称
PROCEDE DE REALISATION D'UNE COUCHE CONTRAINTE
摘要
申请公布号
FR2929447(B1)
申请公布日期
2010.05.28
申请号
FR20080052034
申请日期
2008.03.28
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
DEGUET CHRYSTEL;FOURNEL FRANK
分类号
H01L21/30;H01L21/46
主分类号
H01L21/30
代理机构
代理人
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地址
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