| 发明名称 |
|
| 摘要 |
|
| 申请公布号 |
JP4338246(B2) |
申请公布日期 |
2009.10.07 |
| 申请号 |
JP19990013095 |
申请日期 |
1999.01.21 |
| 申请人 |
|
发明人 |
|
| 分类号 |
C23C16/18;H01L21/285 |
主分类号 |
C23C16/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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