| 摘要 |
PURPOSE:To distinguish and detect a pseudo defect and a fatal defect, by erasing the digital alignment picture of the pseudo defect obtained by using a product to be checked, whose defect is known, from the picture obtained from an exclusive OR of a digital alignment pictures of a reference product and the product to be checked. CONSTITUTION:A reference product and a product to be checked 8 are picked up by a camera 1, and the pictures are binary-coded by a picture processing device and a computer 2. A picture is obtained by the operation of exclusive OR (XOR) of the pictures A and B. A position, where the binary code 1 of the picture becomes the minimum value, is computed, with the position being shifted by the computer 2, a monitor TV, and a keyboard 5. The product to be checked 8 is moved to the position by an X-Y table 6 and a table controller 7. By using the picture Bo and the picture A of the product to be checked, whose defect is known, a digital alignment picture C of a pseudo defect is formed. The picture C is erased from the picture formed by the XOR of the picture A and the picture B. Thus only the defect can be extracted. |
