APPARATUS FOR ASSEMBLING SUBSTRATES AND METHOD FOR ASSEMBLING SUBSTRATES

摘要

PURPOSE: A device and a method for bonding substrates are provided to easily separate a substrate from an adhesive. CONSTITUTION: A substrate separator(120) sprays gas on an upper substrate. The substrate separator separates an adhesive from the upper substrate. A lower substrate which will be combined with the upper substrate is mounted on a lower surface plate(201). A lower chamber(200) is combined with an upper chamber. The lower chamber has a bonding space where the upper substrate is bonded with the lower substrate.