WAFER CLEANING DEVICE AND METHOD OF DRIVING THE SAME

摘要

PURPOSE: A wafer cleaning device and a method for driving the same are provided to prevent the damage of a wafer due to a vibrator by including a sensor with a transfer arm in order to verify the tilt of a vibrator based on the entire surface of a wafer. CONSTITUTION: A wafer is loaded on a chuck(210). A nozzle supplies a cleaning solution on the entire surface of the wafer. A vibrator(240) generates ultrasonic wave to the entire surface of the wafer and vibrates the cleaning solution. A transfer arm(251) is connected to the vibrator and transfers the vibrator above the wafer. A driving motor(252) drives the transfer arm. A sensor(260) measures the tilt of the vibrator based on the wafer.