发明名称 |
Charged particle beam apparatus |
摘要 |
Electrification affected on a surface of a sample which is caused by irradiation of a primary charged particle beam is prevented when plural frames are integrated to obtain an image of a predetermined area of the sample in a charged particle beam apparatus. The predetermined area of the sample is scanned with a primary electron beam from an electron gun, and plural frames are generated and integrated while detecting generated secondary electrons with a detector to obtain the image of the predetermined area. If it is determined by a detection signal of the detector that an electrification amount at the predetermined area becomes a specified value when generating plural frames, an electricity removal voltage is applied to a boosting electrode to remove or reduce the electrification, prior to generation of the next frame. Accordingly, the signal-to-noise ratio of the image obtained by integrating plural frames can be improved.
|
申请公布号 |
US7714288(B2) |
申请公布日期 |
2010.05.11 |
申请号 |
US20080149218 |
申请日期 |
2008.04.29 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
YANO TASUKU;CHENG ZHAOHUI;FURUKAWA TAKASHI;NASU OSAMU |
分类号 |
G21K7/00;G01N23/00;G21G5/00;H01J3/14 |
主分类号 |
G21K7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|