WAFER CENTERING APPARATUS AND WAFER LOADING APPARATUS HAVING THE SAME

摘要

PURPOSE: A wafer centering device and a wafer loading device including the same are provided to make a centering unit align a wafer by a driving unit by interlocking the centering unit with the up and down directions of a loading plate. CONSTITUTION: A wafer loading device includes a frame and a loading plate(30). A support unit(51) is installed in the frame. A centering unit is movably installed on the support unit. The centering unit is interlocked with the up and down directions of the loading plate and moves the wafer loaded on the loading plate to a right position. A loading unit(60) moves the loading plate up and down.