发明名称 |
Kinematic pin with shear member and substrate carrier for use therewith |
摘要 |
A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.
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申请公布号 |
US7597183(B2) |
申请公布日期 |
2009.10.06 |
申请号 |
US20070932224 |
申请日期 |
2007.10.31 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE MICHAEL R.;ENGLHARDT ERIC A.;LOWRANCE ROBERT B.;ELLIOTT MARTIN R.;HUDGENS JEFFREY C. |
分类号 |
B65G15/64;H01L21/68;B65G49/07;H01L21/00 |
主分类号 |
B65G15/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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