发明名称 Silicided polysilicon spacer for enhanced contact area
摘要 An integrated circuit device having an increased source/drain contact area by a formed silicided polysilicon spacer. The polysilicon sidewall spacer is formed having a height less than seventy percent of said gate conductor height, and having a continuous surface silicide layer over the deep source and drain regions. The contact area is enhanced by the silicided polysilicon spacer.
申请公布号 US7598572(B2) 申请公布日期 2009.10.06
申请号 US20060552673 申请日期 2006.10.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;SAMSUNG ELECTRONIC CO., LTD (CORPORATION);CHARTERED SEMICONDUCTOR MANUFACTURING LTD (CORPORATION) 发明人 DYER THOMAS W.;FANG SUNFEI;KU JA-HUM;LEE YONG MENG
分类号 H01L29/40 主分类号 H01L29/40
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