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发明名称
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same
摘要
申请公布号
KR100920189(B1)
申请公布日期
2009.10.06
申请号
KR20020037942
申请日期
2002.07.02
申请人
发明人
分类号
G03F7/20;H01J31/00;H01J37/09;H01J37/12;H01J37/147;H01J37/244;H01J37/28;H01J37/285
主分类号
G03F7/20
代理机构
代理人
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地址
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