发明名称 SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR ELEMENT, LIGHT-EMITTING ELEMENT, AND ELECTRONIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor substrate that is cheap, has a long lifetime and high luminous efficiency, and can be bent, semiconductor element, light-emitting element, and electronic element. <P>SOLUTION: Since there are provided a graphite substrate having heat resistance and at the same time, flexibility with respect to an external force, and a first semiconductor layer provided on the graphite substrate and which includes a nitride of an element in group 13, a method, such as, a pulse sputter deposition method, can be used when the first semiconductor layer is formed on the graphite substrate, and thereby enabling manufacturing at low cost. Furthermore, the nitride of an element in group 13 is inorganic matter and has a long lifetime and can have high luminous efficiency. Moreover, it becomes possible to bend because the graphite substrate has flexibility with respect to an external force. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009200207(A) 申请公布日期 2009.09.03
申请号 JP20080039672 申请日期 2008.02.21
申请人 KANAGAWA ACAD OF SCI & TECHNOL;UNIV OF TOKYO 发明人 FUJIOKA HIROSHI
分类号 C23C14/06;H01L21/203;H01L33/10;H01L33/12;H01L33/32;H01L33/34 主分类号 C23C14/06
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