摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor substrate that is cheap, has a long lifetime and high luminous efficiency, and can be bent, semiconductor element, light-emitting element, and electronic element. <P>SOLUTION: Since there are provided a graphite substrate having heat resistance and at the same time, flexibility with respect to an external force, and a first semiconductor layer provided on the graphite substrate and which includes a nitride of an element in group 13, a method, such as, a pulse sputter deposition method, can be used when the first semiconductor layer is formed on the graphite substrate, and thereby enabling manufacturing at low cost. Furthermore, the nitride of an element in group 13 is inorganic matter and has a long lifetime and can have high luminous efficiency. Moreover, it becomes possible to bend because the graphite substrate has flexibility with respect to an external force. <P>COPYRIGHT: (C)2009,JPO&INPIT |