发明名称 DRIVING APPARATUS, INDUSTRIAL INSTRUMENT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 A driving apparatus which electrically drives a component built in an industrial instrument, comprises a housing including a supply inlet and an exhaust outlet, a fan configured to form an air current so that air is taken into the housing through the supply inlet and exhausted from inside the housing through the exhaust outlet, a driving circuit block which is accommodated in the housing so as to be cooled by the air current, and configured to electrically drive the component, and a cooling unit configured to regulate a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.
申请公布号 US2009218964(A1) 申请公布日期 2009.09.03
申请号 US20080267965 申请日期 2008.11.10
申请人 CANON KABUSHIKI KAISHA 发明人 MOTEGI YASUHIRO
分类号 H02K41/02;H05K7/20 主分类号 H02K41/02
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