发明名称 |
MASK AND DESIGN METHOD THEREOF |
摘要 |
A mask and the design method thereof are provided. The mask includes a light-shielding area shielding off a light, wherein the light-shielding area includes a photonic crystal having a lattice constant, and a ratio of the lattice constant to a wavelength of the light is a specific value within a band gap of the photonic crystal.
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申请公布号 |
US2009220868(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
US20080270566 |
申请日期 |
2008.11.13 |
申请人 |
NANYA TECHNOLOGY CORP. |
发明人 |
LIN CHIA-WEI;HUANG TENG-YEN |
分类号 |
G06F17/50;G02B5/22;G03F1/24;G03F1/54;G03F1/68;H01L21/027 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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