SUBSTRATE HEATING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE

摘要

In a substrate heating apparatus, thermoelectrons generated by a filament (132) in a vacuum heating vessel (103) are accelerated to collide against a conductive heater (131) which forms one surface of the vacuum heating vessel (103), thus generating heat. The conductive heater (131) is made of carbon. At least one of the inner and outer surfaces of the conductive heater (131) is coated with tantalum carbide (TaC).