发明名称 LOCALIZED COMPRESSIVE STRAINED SEMICONDUCTOR
摘要 One aspect of the present subject matter relates to a method for forming strained semiconductor film. According to an embodiment of the method, a crystalline semiconductor bridge is formed over a substrate. The bridge has a first portion bonded to the substrate, a second portion bonded to the substrate, and a middle portion between the first and second portions separated from the substrate. The middle portion of the bridge is bonded to the substrate to provide a compressed crystalline semiconductor layer on the substrate. Other aspects are provided herein.
申请公布号 US2009218566(A1) 申请公布日期 2009.09.03
申请号 US20090463619 申请日期 2009.05.11
申请人 MICRON TECHNOLOGY, INC. 发明人 FORBES LEONARD
分类号 H01L29/04 主分类号 H01L29/04
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