| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting a lid being adequately fixed to a pod in closing the pod aperture by a lid in the FIMS system. SOLUTION: After the step of fixing the lid to a pod, the door in the FIMS system once moves the pod to an unload position while keeping the lid fixed. If the pod is displaced, the fixing of the lid is determined to be inadequate, meanwhile, if the pod is not displaced, the fixation of the lid is determined to be adequate. COPYRIGHT: (C)2009,JPO&INPIT |
