| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas bearing spindle capable of keeping rotation accuracy of a rotary shaft good. SOLUTION: This gas bearing spindle comprises the rotary shaft 1, sleeves 3, 4, and a housing 2. The sleeve 3 is opposed to at least one part on a side of the rotary shaft 1 via a gap. The housing 2 has an opening, and holds the sleeves 3, 4 and the rotary shaft 1 inside the opening. A cavity 1b as a cavity part communicated with the opening formed at the end on the opening side of the housing 2 is formed in the rotary shaft 1. A circumferential groove 1a surrounding the side of the rotary shaft 1 is formed on the side of the rotary shaft 1. A communication hole 1c connecting the circumferential groove 1a and the cavity 1b is formed on the rotary shaft 1. Supply paths 2b for supplying a cooling medium like liquid or gas to the circumferential groove 1a are formed on the sleeves 3, 4 and the housing 2. COPYRIGHT: (C)2009,JPO&INPIT
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