SHEET STRUCTURE, SEMICONDUCTOR DEVICE AND METHOD OF GROWING CARBON STRUCTURE

摘要

The sheet structure contains a linear structure composed of multiple carbon elements disposed with a first space from each other and has multiple linear structure bundles (12) disposed with a second space larger than the first space from each other, a graphite layer (14) provided in interspaces of the multiple linear structure bundles (12) and connected to the multiple linear structure bundles and a filling layer (16) placed in the first space and second space so as to hold the multiple linear structure bundles (12) and graphite layer (14).