| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an electrooptical device suitable for miniaturization by enhancing reliability while preventing dielectric breakdown and element breakdown by laser scribe treatment upon manufacture thereof. SOLUTION: In a step for forming a plurality of signal lines 810 (820, 830) for inspection, high resistance parts 812 (822, 832) are disposed in a layer at least partially different from inspection terminals 103 and drawn around within a region where the inspection terminals 103 are formed on a substrate 10, and formed so as to straddle a cutting region Ct from one to the other of the substrates 10 adjacent to each other in a mother substrate S and in a step for forming the plurality of inspection terminals 103, the inspection terminals 103 are formed apart from the cutting region Ct on the substrate 10 by a prescribed distance d0 according to a spot diameter of a laser in the laser scribe treatment. COPYRIGHT: (C)2009,JPO&INPIT
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