| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate detector capable of detecting substrates having various kinds of thicknesses using a single dog member and a single sensor, and alto to provide a substrate inspection apparatus equipped with the same. SOLUTION: A plurality of substrates 1 are stored bridging horizontal grooves formed being parallelly spaced in both side faces opposite to each other inside a cassette 2. The substrate detector is equipped with an arm 4 moved in the arrangement direction of the grooves; a wafer sensor 13 which is fixed to the arm 4 and detects the substrates 1; a dog member 11 fixed to the cassette 2 and provided with concave and convex portions formed at a pitch equal to the arrangement pitch of the grooves; an optical sensor 10 which is fixed to the arm 4 and detects the concave and convex portions of the dog member 11; and a CPU 21 for determining the stored state of the substrates 1 based on the cycles of detection signals of the wafer sensor 13 and the optical sensor 10 and a phase difference between the detection signals. COPYRIGHT: (C)2009,JPO&INPIT |
